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Micro- and Nanosystems: Volume 872 - Materials and Devices (Paperback) Loot Price: R684
Discovery Miles 6 840
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Micro- and Nanosystems: Volume 872 - Materials and Devices (Paperback): Cengiz S Ozkan, David A. Lavan, Mark McNie, Somuri...
Micro- and Nanosystems: Volume 872 - Materials and Devices (Paperback): Cengiz S Ozkan, David A. Lavan, Mark McNie, Somuri...

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Micro- and Nanosystems: Volume 872 - Materials and Devices (Paperback)

Cengiz S Ozkan, David A. Lavan, Mark McNie, Somuri Prasad

Series: MRS Proceedings

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Loot Price R684 Discovery Miles 6 840 | Repayment Terms: R64 pm x 12*

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This book focuses on: microsystems, including micromachines and microelectromechanical systems (MEMS), as well as micro-optical-electromechanical systems (MOEMS); and nanosystems, also referred to as nanoelectromechanical systems (NEMS) or molecular machines, including devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of physical and chemical sensor applications have been addressed with these technologies and are outlined in the book. An overall perspective on the technology required to leap from conventional micro- and nanosystems to bionanosystems, and to realize functional materials and systems for applications such as drug delivery is provided. Additional highlights include a look at the application of focused ion beam milling in characterizing MEMS devices, which is becoming a conventional tool for this purpose. The electrodeposition of structures through high aspect ratio features in thick resists is also examined. And surface and materials issues for reliability of MEMS devices are assessed and provide insight into how characterization schemes for evaluating MEMS reliability can be developed.

General

Imprint: Cambridge UniversityPress
Country of origin: United Kingdom
Series: MRS Proceedings
Release date: May 2014
First published: June 2014
Editors: Cengiz S Ozkan • David A. Lavan • Mark McNie • Somuri Prasad
Dimensions: 229 x 152 x 28mm (L x W x T)
Format: Paperback - Trade
Pages: 546
ISBN-13: 978-1-107-40894-4
Barcode: 9781107408944
Categories: Books > Professional & Technical > Technology: general issues > Engineering: general
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Books > Professional & Technical > Mechanical engineering & materials > Materials science
Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
LSN: 1-107-40894-6

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