Symposium on VLSI Technology 2000 (Hardcover)


These conference prodeedings cover such topics as: copper interconnects; novel devices; high-K dielectrics; process technology; embedded DRAM; gate electrode engineering; DRAM cells; gate oxide scaling and reliability; DRAM capacitors; and high performance RF.

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Product Description

These conference prodeedings cover such topics as: copper interconnects; novel devices; high-K dielectrics; process technology; embedded DRAM; gate electrode engineering; DRAM cells; gate oxide scaling and reliability; DRAM capacitors; and high performance RF.

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Product Details

General

Imprint

I.E.E.E.Press

Country of origin

United States

Release date

July 2000

Availability

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Authors

Dimensions

279 x 216mm (L x W)

Format

Hardcover

Pages

242

ISBN-13

978-0-7803-6306-9

Barcode

9780780363069

Categories

LSN

0-7803-6306-X



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