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Books > Computing & IT > Computer hardware & operating systems > Computer architecture & logic design

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Applications of Plasma Processes to V.L.S.I.Technology (Hardcover) Loot Price: R1,170
Discovery Miles 11 700
Applications of Plasma Processes to V.L.S.I.Technology (Hardcover): Takuo Sugano
Applications of Plasma Processes to V.L.S.I.Technology (Hardcover): Takuo Sugano

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Applications of Plasma Processes to V.L.S.I.Technology (Hardcover)

Takuo Sugano

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Loot Price R1,170 Discovery Miles 11 700 | Repayment Terms: R109 pm x 12*

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This book presents state-of-the-art research in microelectronic processing for very large scale integration. Emphasizing applications and techniques, the book provides considerable insight into Japan's technological effort in this important area of science. Focused on research involving plasma deposition and dry etching, considerable attention is devoted to MOS gate fabrication, the studies of the influence of process parameters on electrical properties, dry processing technologies, and the theory of plasma chemical reactions.

General

Imprint: John Wiley & Sons
Country of origin: United States
Release date: October 1985
Authors: Takuo Sugano
Dimensions: 230 x 150mm (L x W)
Format: Hardcover
Pages: 410
ISBN-13: 978-0-471-86960-3
Barcode: 9780471869603
Categories: Promotions
Books > Computing & IT > Computer hardware & operating systems > Computer architecture & logic design
Books > Computing & IT > Computer hardware & operating systems > Computer architecture & logic design > General
LSN: 0-471-86960-0

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