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Microelectronic Device Technology Ii (Paperback)
BurnettA collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues.
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Product Description
A collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues.
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Product Details
General
Imprint | Spie Press |
Country of origin | United States |
Release date | October 1998 |
Availability | Supplier out of stock. If you add this item to your wish list we will let you know when it becomes available. |
Authors | Burnett |
Dimensions | 267 x 210mm (L x W) |
Format | Paperback |
Pages | 364 |
ISBN-13 | 978-0-8194-2965-0 |
Barcode | 9780819429650 |
Categories | |
LSN | 0-8194-2965-1 |
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