In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
Imprint | Springer-Verlag |
Country of origin | Germany |
Series | Springer Series in Materials Science, 109 |
Release date | April 2008 |
Availability | Expected to ship within 10 - 15 working days |
First published | 2008 |
Editors | Diederik Depla, Stijn Mahieu |
Dimensions | 235 x 155 x 45mm (L x W x T) |
Format | Hardcover |
Pages | 572 |
Edition | 2008 ed. |
ISBN-13 | 978-3-540-76662-9 |
Barcode | 9783540766629 |
Categories | |
LSN | 3-540-76662-6 |