0
Your cart

Your cart is empty

Books > Professional & Technical > Mechanical engineering & materials > Materials science

Buy Now

MRS Proceedings Chemical-Mechanical Planarization, Volume 867 (Hardcover, illustrated edition) Loot Price: R514
Discovery Miles 5 140
  • This item is a special order that could take a long time to obtain.

MRS Proceedings Chemical-Mechanical Planarization, Volume 867 (Hardcover, illustrated edition): E. C. Johns, A. Kumar, J. A...

Share your images

MRS Proceedings Chemical-Mechanical Planarization, Volume 867 (Hardcover, illustrated edition)

E. C. Johns, A. Kumar, J. A Lee, Y. S. Obeng, I Vos

 (sign in to rate)
Loot Price R514 Discovery Miles 5 140

Bookmark and Share

Supplier out of stock. If you add this item to your wish list we will let you know when it becomes available.

Technology requirements associated with the progressive scaling of devices for future technology nodes, coupled with the aggressive introduction of new materials, places tremendous demands on chemical-mechanical polishing. The goal of this 2005 book, which is part of a popular series from MRS, is to bring together experts from a broad spectrum of research and technology groups currently working on CMP, to review advances made, and to offer a comprehensive discussion of future challenges that must be overcome. The book shows trends in the development of consumables, process modules, tool designs, process integration, modeling, defect characterization, and metrology. Topics include: planarization processes and applications; consumables -CMP pads and slurries; CMP equipment and metrology; and CMP modeling and simulation.

General

Imprint: Materials Research Society
Country of origin: United States
Release date: July 2005
First published: July 2005
Editors: E. C. Johns • A. Kumar • J. A Lee • Y. S. Obeng • I Vos
Format: Hardcover - Cloth over boards
Pages: 302
Edition: illustrated edition
ISBN-13: 978-1-55899-820-9
Categories: Books > Professional & Technical > Technology: general issues > Engineering: general
Promotions
Books > Professional & Technical > Mechanical engineering & materials > Materials science
Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
LSN: 1-55899-820-9
Barcode: 9781558998209

Is the information for this product incomplete, wrong or inappropriate? Let us know about it.

Does this product have an incorrect or missing image? Send us a new image.

Is this product missing categories? Add more categories.

Review This Product

No reviews yet - be the first to create one!

Partners