As the deep-ultraviolet (DUV) laser technology continues to mature,
an increasing number of industrial and manufacturing applications
are emerging. For example, the new generation of semiconductor
inspection systems is being pushed to image at increasingly shorter
DUV wavelengths to facilitate inspection of deep sub-micron
features in integrated circuits. DUV-sensitive charge-coupled
device (CCD) cameras are in demand for these applications. Although
CCD cameras that are responsive at DUV wavelengths are now
available, their long-term stability is still a major concern. This
book describes the degradation mechanisms and long-term performance
of CCDs in the DUV, along with new results of device performance at
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