0
Your cart

Your cart is empty

Books > Professional & Technical > Energy technology & engineering > Electrical engineering

Not currently available

CCD Image Sensors in Deep-Ultraviolet - Degredation Behavior and Damage Mechanisms. Microtechnology and Mems (Electronic book text)
CCD Image Sensors in Deep-Ultraviolet - Degredation Behavior and Damage Mechanisms. Microtechnology and Mems (Electronic book...
CCD Image Sensors in Deep-Ultraviolet - Degredation Behavior and Damage Mechanisms. Microtechnology and Mems (Electronic book...

Share your images

CCD Image Sensors in Deep-Ultraviolet - Degredation Behavior and Damage Mechanisms. Microtechnology and Mems (Electronic book text)

F. M. Li, A. Nathan

 (sign in to rate)

Bookmark and Share

We don't currently have any sources for this product. If you add this item to your wish list we will let you know when it becomes available.

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

General

Imprint: Springer
Country of origin: United States
Release date: 2005
Authors: F. M. Li • A. Nathan
Format: Electronic book text
Pages: 230
ISBN-13: 978-6610360710
Barcode: 9786610360710
Categories: Promotions
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Applied optics
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Applied optics > General
Books > Professional & Technical > Energy technology & engineering > Electrical engineering
Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General
LSN: 6610360715

Is the information for this product incomplete, wrong or inappropriate? Let us know about it.

Does this product have an incorrect or missing image? Send us a new image.

Is this product missing categories? Add more categories.

Review This Product

No reviews yet - be the first to create one!

Loyalty partners