International Conference on Interconnect Technology (Paperback, illustrated edition)


Topics discussed in this volume include: metallization; dielectrics; silicide and salicide; CMP/Planarization; dry processing; process integration; internconnect systems; process control/modelling; and reliability.

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Product Description

Topics discussed in this volume include: metallization; dielectrics; silicide and salicide; CMP/Planarization; dry processing; process integration; internconnect systems; process control/modelling; and reliability.

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Product Details

General

Imprint

I.E.E.E.Press

Country of origin

United States

Release date

June 2003

Availability

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Dimensions

279 x 216mm (L x W)

Format

Paperback

Pages

316

Edition

illustrated edition

ISBN-13

978-0-7803-7797-4

Barcode

9780780377974

Categories

LSN

0-7803-7797-4



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