This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.
Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.
All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique.
40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.
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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.
Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.
All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique.
40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.
Imprint | William Andrew Publishing |
Country of origin | United States |
Release date | October 2012 |
Availability | Expected to ship within 12 - 17 working days |
First published | December 2012 |
Authors | Kiyotaka Wasa |
Dimensions | 229 x 152 x 40mm (L x W x T) |
Format | Hardcover |
Pages | 660 |
Edition | 2nd edition |
ISBN-13 | 978-1-4377-3483-6 |
Barcode | 9781437734836 |
Categories | |
LSN | 1-4377-3483-9 |