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Ultra-Clean Technology Handbook - Volume 1: Ultra-Pure Water (Hardcover)
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
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Product Description
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
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Product Details
General
Imprint | Crc Press |
Country of origin | United States |
Release date | June 1993 |
Availability | Expected to ship within 12 - 17 working days |
First published | June 1993 |
Editors | Tadahiro Ohmi |
Dimensions | 246 x 174mm (L x W) |
Format | Hardcover |
Pages | 944 |
ISBN-13 | 978-0-8247-8753-0 |
Barcode | 9780824787530 |
Categories | |
LSN | 0-8247-8753-6 |
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