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Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions. Materials Science and Process Technology Series. (Electronic book text)
Stephen M. Rossnagel, Jerome J. Cuomo, William D. WestwoodThis is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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Product Description
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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Product Details
General
Imprint | William Andrew Publishing |
Country of origin | United States |
Release date | 1990 |
Availability | We don't currently have any sources for this product. If you add this item to your wish list we will let you know when it becomes available. |
Authors | Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood |
Format | Electronic book text |
Pages | 546 |
ISBN-13 | 978-6612002762 |
Barcode | 9786612002762 |
Categories | |
LSN | 661200276X |
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