Piezoresistor Design and Applications provides an overview of
these MEMS devices and related physics. The text demonstrates how
MEMS allows miniaturization and integration of sensing as well as
efficient packaging and signal conditioning. This text for
engineers working in MEMS design describes the piezoresistive
phenomenon and optimization in several applications. Includes
detailed discussion of such topics as; coupled models of mechanics,
materials and electronic behavior in a variety of common geometric
implementations including strain gages, beam bending, and membrane
loading. The text concludes with an up-to-date discussion of the
need for integrated MEMS design and opportunities to leverage new
materials, processes and MEMS technology.
Piezoresistor Design and Applications is an ideal book for
design engineers, process engineers and researchers.
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