As miniaturization, batch fabrication, and integrated
electronics rapidly enable the development of a broad range of
smart products, MEMs, MOEMS, and NEMS are creating enormous
opportunities for commerce and functionality. This significant and
uniquely comprehensive five-volume reference is a valuable source
for research workers, practitioners, computer scientists, students,
and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical
Systems/Nanoelectromechanical Systems) covers all of the major
topics within the subject including design methods, fabrication
techniques, manufacturing methods, sensors and actuators, and Micro
Optical Electro Mechanical Systems. The many applications of MEMS
technology include computer devices, electronics, instrumentation,
industrial process control, biotechnology, medicine, chemical
systems, office equipment, and communications. More than 100
coauthors from nearly 20 countries present clearly written,
self-contained, accessible and comprehensive contributions with
helpful standard features including an introduction, summary,
extensive figures and design examples with comprehensive reference
lists. The remarkable breadth and depth of the topics spanning this
diverse field require the 5-volume extent of this notable reference
resource that is based on the work of an internationally recognized
board of coauthors.
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