This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective of this book is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists, and engineers in academic and industry community with the latest developments in this growing field. The scope of the book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and review of thevarious processing techniques used. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described. Finally, theoretical and modeling studies on surface nucleation are reviewed.
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This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective of this book is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists, and engineers in academic and industry community with the latest developments in this growing field. The scope of the book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and review of thevarious processing techniques used. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described. Finally, theoretical and modeling studies on surface nucleation are reviewed.
Imprint | William Andrew Publishing |
Country of origin | United States |
Release date | December 1996 |
Availability | Expected to ship within 10 - 15 working days |
First published | 1997 |
Authors | Huimin Liu, David S. Dandy |
Dimensions | 229 x 152 x 12mm (L x W x T) |
Format | Hardcover |
Pages | 206 |
ISBN-13 | 978-0-8155-1380-3 |
Barcode | 9780815513803 |
Categories | |
LSN | 0-8155-1380-1 |