Process Integration and Device Characterization in Microelectronic Manufacturing (VHS video casette)

In the video from SPIE, Badih El-Kareh is a Senior Scientist at IBM, Hopewell Junction, New York, working in process integration, 256 Mbit DRAM project. A discussion of submicron manufacturing technologies, integration problems, and device characterization will be provided in this course. Technology trends and issues will be presented, with a focus on CMOS processes and their characterization. Techniques to extract MOSFET parameters and relate them to processes will be described.