Thin-film organic semiconductor devices such as organic light
emitting diodes (OLEDs) and organic photovoltaics can be fabricated
in a variety of ways, including physical vapor deposition (PVD).
PVD is a process for depositing thin films of precisely controlled
thicknesses and material compositions onto a substrate in a vacuum
system. Resistively heated crucibles, referred to as boats, are
commonly used to heat source materials to a sufficient temperature
to cause vaporization or sublimation. These boat designs typically
contain a single opening which results in a conical vapor stream
for coating both a substrate and a nearby thickness and rate
sensor. In this study, a new boat design incorporating a dual vapor
stream, where one vapor stream is pointed toward the sensor and the
other is directed toward the substrate in an orthogonal
orientation, were investigated. This design is intended to provide
particularly useful features for the fabrication of organic
thin-films of complex compositions involving multiple components.
It is also designed to reduce material waste by shortening the
source to substrate distance.
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