This "second edition" includes: expanded sections on MEMS and microfluidics related fabrication issuesnew chapters on polymer and glass microprocessing, as well as serial processing techniques200 completely new and 200 modified figuresmore coverage of imprinting techniques, process integration and economics of microfabrication300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problemssolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book
With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.
www.wiley.com/go/Franssila_Micro2e
Or split into 4x interest-free payments of 25% on orders over R50
Learn more
This "second edition" includes: expanded sections on MEMS and microfluidics related fabrication issuesnew chapters on polymer and glass microprocessing, as well as serial processing techniques200 completely new and 200 modified figuresmore coverage of imprinting techniques, process integration and economics of microfabrication300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problemssolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book
With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.
www.wiley.com/go/Franssila_Micro2e
Imprint | John Wiley & Sons |
Country of origin | United States |
Release date | September 2010 |
Availability | Expected to ship within 12 - 17 working days |
First published | October 2010 |
Authors | S. Franssila |
Dimensions | 246 x 189 x 30mm (L x W x T) |
Format | Hardcover |
Pages | 534 |
Edition | 2nd Edition |
ISBN-13 | 978-0-470-74983-8 |
Barcode | 9780470749838 |
Categories | |
LSN | 0-470-74983-0 |