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Atomic Layer Deposition for Semiconductors (Hardcover, 2014 ed.)
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
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Product Description
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
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Product Details
General
Imprint | Springer-Verlag New York |
Country of origin | United States |
Release date | October 2013 |
Availability | Expected to ship within 10 - 15 working days |
First published | 2014 |
Editors | Cheol Seong Hwang |
Dimensions | 235 x 155 x 20mm (L x W x T) |
Format | Hardcover |
Pages | 263 |
Edition | 2014 ed. |
ISBN-13 | 978-1-4614-8053-2 |
Barcode | 9781461480532 |
Categories | |
LSN | 1-4614-8053-1 |
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