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Books > Professional & Technical > Technology: general issues
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Microengineering, MEMS, and Interfacing - A Practical Guide (Electronic book text)
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Microengineering, MEMS, and Interfacing - A Practical Guide (Electronic book text)
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MEMS devices are finding increasingly widespread use in a variety
of settings, from chemical and biological analysis to sensors and
actuators in automotive applications. Along with this massive
growth, the field is still experiencing growing pains as
fabrication processes are refined and new applications are
attempted. Anyone serious about entering the field must have a
realistic knowledge of just what is possible with MEMS technologies
as well as the myriad issues involved in fabrication and device
integration.
Microengineering, MEMS, and Interfacing: A Practical Guide provides
a straightforward, down-to-earth overview of the current state of
MEMS technology. The first section systematically reviews the
various bulk and surface micromachining methods, photolithography
masks, and nonsilicon processes, examining their capabilities,
limitations, and suggested uses. Next, the author details the
characteristics of individual devices and systems, their advantages
and shortcomings, and how they can be combined to achieve desired
functionality. He includes condensed introductions to relevant
chemistry and biochemistry and then demonstrates applications of
MEMS in these areas. Beginning with a short introduction to
electronics, the final section explores the issues involved in
interfacing MEMS components with other systems.
With judicious use of illustrations to clarify the discussion,
Microengineering, MEMS, and Interfacing: A Practical Guide offers
hands-on tools for solving specific problems along with the insight
necessary to use them most effectively.
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