High Frequency Electrochemical Micromachining (Paperback)

Microsystem and integrated circuitry components are mostly manufactured using semiconductor technologies. Fabrication using high strength metals, for demanding aerospace, mechanical, or biomedical applications, requires novel technologies which are different from those for silicon. A promising mass production method for micro/meso scale components is electrochemical micromachining. The complex system, however, requires high precision mechanical fixtures and sophisticated instrumentation for proper process control. This work presents an electrochemical micromachining system with a closed-loop feedback control, programmed using a conditional binary logic approach to improve material removal rate, decrease machining variation and reduce workpiece damage.