Crystal Growth from the Melt (Hardcover)


The bulk single crystals of semiconductors (e.g. Si, GaAs) and oxides which are at present commercially produced have mostly non-uniform properties in the microscale (e.g. doping striations) and in the macroscale (longitudinal and lateral segregation). Such inhomogeneities are deleterious for the performance of the devices produced from these crystals. This book gives a review of the various origins of inhomogeneities occuring during crystal growth. It is shown that convection is the major source of the non-uniformities in the technically used growth configurations, e.g. Czochralski-, zone- and Bridgman-methods, because the growth rate is controlled by the heat transport. The formalism of hydrodynamics, especially dimensionless numbers, is used for a modeling of melt growth, giving a correlation between the occurrence of inhomogeneities and relevant growth parameters. The results of the theoretical and experimental modeling are found to correlate with results of real crystal growth, especially for cases of dominating buoyancy convection. Various measures in avoiding inhomogeneities are derived from the models and are discussed with respect to their efficiency and practical applicability.

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Product Description

The bulk single crystals of semiconductors (e.g. Si, GaAs) and oxides which are at present commercially produced have mostly non-uniform properties in the microscale (e.g. doping striations) and in the macroscale (longitudinal and lateral segregation). Such inhomogeneities are deleterious for the performance of the devices produced from these crystals. This book gives a review of the various origins of inhomogeneities occuring during crystal growth. It is shown that convection is the major source of the non-uniformities in the technically used growth configurations, e.g. Czochralski-, zone- and Bridgman-methods, because the growth rate is controlled by the heat transport. The formalism of hydrodynamics, especially dimensionless numbers, is used for a modeling of melt growth, giving a correlation between the occurrence of inhomogeneities and relevant growth parameters. The results of the theoretical and experimental modeling are found to correlate with results of real crystal growth, especially for cases of dominating buoyancy convection. Various measures in avoiding inhomogeneities are derived from the models and are discussed with respect to their efficiency and practical applicability.

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Product Details

General

Imprint

Springer-Verlag

Country of origin

Germany

Release date

December 1988

Availability

Supplier out of stock. If you add this item to your wish list we will let you know when it becomes available.

First published

June 1988

Authors

Format

Hardcover

Pages

138

ISBN-13

978-3-540-18603-8

Barcode

9783540186038

Categories

LSN

3-540-18603-4



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