In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
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In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
Imprint | William Andrew Publishing |
Country of origin | United States |
Release date | December 2004 |
Availability | Supplier out of stock. If you add this item to your wish list we will let you know when it becomes available. |
First published | 2005 |
Authors | Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi |
Dimensions | 229 x 152 x 37mm (L x W x T) |
Format | Hardcover |
Pages | 532 |
Edition | New |
ISBN-13 | 978-0-8155-1483-1 |
Barcode | 9780815514831 |
Categories | |
LSN | 0-8155-1483-2 |