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Measurement Technology for Micro-Nanometer Devices (Hardcover)
W. ZhangA fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Product Description
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Product Details
General
Imprint | John Wiley & Sons |
Country of origin | United States |
Release date | December 2016 |
Availability | Expected to ship within 7 - 13 working days |
First published | 2017 |
Authors | W. Zhang |
Dimensions | 250 x 177 x 21mm (L x W x T) |
Format | Hardcover |
Pages | 344 |
ISBN-13 | 978-1-118-71796-7 |
Barcode | 9781118717967 |
Categories | |
LSN | 1-118-71796-1 |
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